| 摘要 |
PROBLEM TO BE SOLVED: To provide a supporting means of an optical element for surely fixing an optical element by reducing an external force added to the optical element such as a lens, and to provide an optical apparatus such as an optical system by the supporting means of the optical element and an aligner, and a device manufacturing method. SOLUTION: The supporting means is provided with a first support member for supporting the outer peripheral part of the optical element, and a second support member positioned at an outside diameter side of the first support member and supporting the first support member. The support means also has a connection member fixing the first support member in a planar direction orthogonal to a light axis to the second support member, and an elastic member pushed in the light axis direction. COPYRIGHT: (C)2004,JPO
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