| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum treatment apparatus which finds anomalies in an early stage by detecting a temperature of a cooling medium, deals with them, and saves a required space and a cost for a cooling system. SOLUTION: This apparatus has a temperature sensor 30 at a feed part or a drain part for supplying and draining water to a groove 22a of a backing plate 22. The temperature sensor 30 is connected to a measuring device 31. When a flow rate of cooling water decreases or the water does not circulate, the temperature of the circulating cooling water rises, and the temperature rise is detected by the temperature sensor 30. Then, a judging part 31b judges that the temperature of the circulating water is abnormal, after having compared with the standard temperature, and an operation-directing part 31c makes a display 33 or a voice output part 34 output information for warning. COPYRIGHT: (C)2004,JPO
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