| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum deposition system which can prevent the wear of electrodes for generating discharge etc., by reducing the voltage to generate plasma discharge. SOLUTION: The vacuum deposition system 30 is provided with a vacuum chamber 1, a plasma discharge electrode 2 also functioning as a substrate holder for holding a substrate, a power unit 15 for supplying electric power to cause discharge in the vacuum chamber 1 through the electrode 2, a discharge start electrode 21 and a discharge start electrode driving mechanism 25 for driving the electrode 21. The electrode 21 is arranged in an operative position and is kept at the same potential as the electrode 2 until the plasma discharge is started. When the plasma discharge by the electrode 2 is started, the plasma discharge electrode is retreated from the operative position. As a result, the voltage to start the discharge in the vacuum chamber 1 can be lowered and the voltage to generate the plasma discharge can be lowered. COPYRIGHT: (C)2004,JPO
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