LIQUID MATERIAL FEEDING DEVICE FOR CVD, AND METHOD FOR MANUFACTURING OXIDE SUPERCONDUCTOR

摘要

PROBLEM TO BE SOLVED: To prevent the feed of a liquid raw material to a vaporizer from being interrupted, and to continuously feed raw material gas from the vaporizer over a long period of time. SOLUTION: A liquid raw material feeding device for CVD is provided with liquid raw material feed units 10a and a vaporizer 50. Each raw liquid material feed unit 10a is provided with a storage container 42 to store the liquid raw material and a liquid raw material feeder 30 to which the liquid raw material 34 stored in the container 42 is fed through a liquid pump 35. The vaporizer 50 is connected to the liquid raw material feeder 30 to evaporate the liquid raw material 34 fed from the feeder 30. In the liquid raw material feeding device, a plurality of liquid raw material feed units 10a are provided to one vaporizer 50, and each liquid pump 35 of each of the plurality of raw liquid material feed units 10a is electrically connected to a liquid pump flow rate control means 90. The flow rate control means 90 controls the total amount of the liquid raw material 34 fed to the vaporizer 50 according to the flow rate of the liquid raw material 34 to be fed from the liquid pump 35 to the corresponding liquid raw material feeder 30. COPYRIGHT: (C)2004,JPO