CASSETTE FOR PHOTORECEPTOR, THIN FILM DEPOSITION APPARATUS, AND THIN FILM DEPOSITION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a film deposition product of less defects and excellent mass productivity at a low manufacturing cost. SOLUTION: A plurality of cylindrical base bodies 26 for film deposition are erected inside a cylindrical sealed container with gas passing holes formed therein so that each axis is located at a substantially equal distance and on the same circumference. In addition, a heater 27 is formed in each cylindrical base body for film deposition to obtain a cassette 23 for photoreceptor with an a-Si layer deposited on each base body for film deposition by a hot wire CVD method. COPYRIGHT: (C)2004,JPO