WASHING DEVICE AND WASHING SYSTEM USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a washing device capable of safely and easily washing materials to be treated with organic solvent, and to provide a washing system using the device. SOLUTION: The washing device comprises: a base plate 32; a pressure resistant washing chamber 33 equipped on the base plate 32; a washing vessel 34 equipped inside the washing chamber 33; a supporter 35 erected on the base plate 32; a cover plate 36 slidingly fitted to the supporter 35 and clogging the upper part of the washing chamber 33; a holding frame 37 movably attached so as to be nearer to and away from the lower surface of the cover plate 36 for attachably/detachably holding a washing box 4 in which the material to be treated is put; a drive cylinder 39 for sliding the cover plate 36 along the supporter 35; and a drive cylinder 38 for horizontally moving the holding frame 37 so as to make the frame approach and part from the cover plate 36. COPYRIGHT: (C)2004,JPO