HEATING TREATMENT METHOD OF OZONE WATER

摘要

PROBLEM TO BE SOLVED: To improve the safety of a treating operation and reduce the load of rinse and wastewater disposal as compared with conventional condensation and high-temperature chemical liquid treatments by providing a method for effectively super-heating high concentration ozone water by charging less energy to utilize the treatment of a substrate or the like. SOLUTION: In the method that the surface of an object to be treated is treated or cleaned by supplying ozone onto the material. The heating method for ozone water is characterized by using the heated ozone water mixed with steam immediately before supplying the ozone water. The ozone water can be loaded with an acid. an alkali and an inhibitor for decomposing ozone. A substrate or the like is efficiently treated by utilizing the increased oxidation power of ozone by heating. The rinse and wastewater disposal is facilitated compared with the treatment by the conventional plasma ashing and the mixture of sulfuric acid with hydrogen peroxide. COPYRIGHT: (C)2004,JPO