| 发明名称 |
SEMICONDUCTOR INSPECTING APPARATUS |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To automatically set up the conditions of photographing the structure on a semiconductor wafer by a semiconductor inspecting apparatus. <P>SOLUTION: An inspection condition database 207 is provided which contains inspection positions 202 and inspection items 203 of design data and an inspection condition file wherein photographing conditions 206 of a semiconductor device and inspection positions are related, and inspection conditions 210 are found referencing the inspection condition database 207. <P>COPYRIGHT: (C)2004,JPO |
| 申请公布号 |
JP2004095657(A) |
申请公布日期 |
2004.03.25 |
| 申请号 |
JP20020251438 |
申请日期 |
2002.08.29 |
| 申请人 |
HITACHI HIGH-TECHNOLOGIES CORP |
发明人 |
SUGIYAMA AKIYUKI;SATO NORIO;YAMAGUCHI SATOSHI;TAKANE ATSUSHI;NAKANISHI KUNIO |
| 分类号 |
G01B11/00;G06T1/00;H01J37/22;H01J37/28;H01L21/66 |
主分类号 |
G01B11/00 |
| 代理机构 |
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代理人 |
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