| 摘要 |
PROBLEM TO BE SOLVED: To provide a rotary drive mechanism comparatively simple in structure and high in sealability by mainly using a ball screw. SOLUTION: This rotary drive mechanism is provided on a partition wall 4 for partitioning the vacuum side and the atmospheric side and rotates a rotary member arranged on the vacuum side, and it is furnished with the nut part 16A, 18A sides of the ball screws 16, 18 arranged on the vacuum side and rotatably supported through a bearing on the partition wall, output shafts 48, 50 with one end parts connected to the nut part side and other end parts connected to the rotary member, input shafts 30, 34 arranged on the atmospheric side, connected to the ball shaft parts 16B, 18B of the ball screw and to linearly move, driving means 38, 42 to advance and retreat the input shaft and expandable sealing members 44, 46 inserting the input shaft inside, with one end parts connected to the ball shaft part side and other end parts connected to the partition wall and rotates the rotary member by advancing and retreating the input shaft. COPYRIGHT: (C)2004,JPO |
