| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a vacuum processing apparatus which suppresses increase of the manufacturing cost and does not damage maintainability while responding to the diameter increase of the specimen. <P>SOLUTION: The vacuum processing apparatus comprises a cassette block 1 and a plurality of vacuum processing blocks 2. The cassette block 1 has a cassette pedestal 16 for loading cassettes 12A to 12D, in which the specimens are housed, and a first specimen-transporting means 9 for transporting the specimen. Each of the vacuum processing blocks 2 has load/lock chambers 4, 5, vacuum processing chambers 6, 7 for processing the specimen under vacuum, and a second specimen-transporting means 10 for transporting the specimen under vacuum. The cassette pedestal 16 is arranged in the front portion of the vacuum processing apparatus, while the first specimen-transporting means 9 transports the specimen between the cassettes 12A to 12D and the load/lock chambers 4, 5, which are arranged in each of the vacuum processing blocks 2. <P>COPYRIGHT: (C)2004,JPO</p> |
