发明名称 CLEAN TRANSFER ROBOT
摘要 PROBLEM TO BE SOLVED: To provide an inexpensive clean transfer robot, properly applicable to various work environments and work contents by making the basic components common, and selectively assembling the other components to the basic components. SOLUTION: This clean transfer robot includes: a rotary plate 12 rotated round the vertical axis; a strut 13 erected on the rotary plate 12; and a fitting bracket 15 disposed on the strut 13 to be elevated. Two or more kinds of board transfer units 200A to 200 E are alternatively assembled to the fitting bracket 15. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004090186(A) 申请公布日期 2004.03.25
申请号 JP20020256948 申请日期 2002.09.02
申请人 AITEC CORP 发明人 KIMATA KAZUO;NAKAMORI TAKAO;KATO KATSUHIKO;NAKANO KIYONORI
分类号 B25J9/04;B65G49/06;H01L21/677;H01L21/68;(IPC1-7):B25J9/04 主分类号 B25J9/04
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