ALIGNMENT TOOL, LITHOGRAPHY EQUIPMENT, METHOD FOR ALIGNMENT, DEVICE AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an alignment tool which obtains a variable focal depth of an alignment beam. SOLUTION: An extra optical element is put across an alignment beam during alignment. If an alignment mark on a substrate is at a focal length different from that of the front surface of the substrate, the optical element is adjusted to focus the alignment beam on the alignment mark on the substrate. COPYRIGHT: (C)2004,JPO