| 摘要 |
PROBLEM TO BE SOLVED: To control a film thickness adjustment with excellent responsiveness even in the case of forming an organic layer by vapor deposition of an organic material. SOLUTION: The manufacturing device of the organic electroluminescent element comprises a vapor deposition source 13 of an organic material extending in a line shape, transfer means 11, 12 that move relative positions of the vapor deposition source 13 and a substrate 2 of the organic electroluminescent element in the direction crossing at right angles the longitudinal direction of the vapor deposition source 13, a film thickness monitor 14 for detecting a vapor deposition speed of the organic material that is vapor-deposited from the vapor deposition source 13 to the substrate 2, and control means 15, 16 that change moving speed of the relative positions by the transfer means 11, 12 based on the detected result by the film thickness monitor 14. COPYRIGHT: (C)2004,JPO
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