| 摘要 |
PROBLEM TO BE SOLVED: To improve measurement accuracy of a measuring probe by improving followability to a measuring surface and by reducing hysteresis. SOLUTION: This measuring probe is equipped with a movable member 21 having the tip equipped with a contactor 25 abutting on the measuring surface and having the base end where a reflecting surface 27 for reflecting measuring light L1 is formed integrally, a fixing member 22 wherein an insertion hole 22a where the movable member 21 is inserted is provided, and an aperture 29 is formed between the hole wall of the insertion hole 22a and the peripheral face of the contact element, and the aperture 29 constitutes an air bearing 31 for supporting the movable member 21 movably in the axis 28 direction, a ferromagnetic material 23 mounted on the base end side of the movable member 21, and a magnetic force generation part 24 for generating a magnetic force in the axis direction of the movable member 21 to be applied to the ferromagnetic material 23. COPYRIGHT: (C)2004,JPO
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