DEVICE FOR ANALYSING PHYSICAL AND/OR CHEMICAL PROPERTIES OF THE SURFACE LAYER OF A SOLID BODY (VARIANTS)

摘要

The inventive device comprises a unit for forming atomic and/or molecular and/or ion and/ or electron and/ or photon beams which are used for performing an action on the surface layer of a sample. The output bus of said forming unit connected to a recording system and containing means for producing unit impulses of said beams is introduced into a vacuum chamber. The device also comprises an electric discharge initiator provided with an electrode introduced into said vacuum chamber and a timer. A high pressure sensor connected to the vacuum chamber, an additional reservoir for cooling agent arranged in the vacuum chamber, and an analysing means which is disposed between a recording means and the sample and used for recording the spectra of energy quanta emitted by the surface layer of a solid body. Said invention improves the accuracy and informativenes of measurement results.