| 摘要 |
<P>PROBLEM TO BE SOLVED: To enable an unnecessary detection signal of an angular velocity sensor using a tuning vibrator made of a single crystal piezoelectric material such as a crystal or the like to be reduced. <P>SOLUTION: A tuning vibrator 1 is made of a base 2 and a vibrating arm 3. The sectional shape of the arm 3 can be formed in a shape symmetrical to a thicknesswise direction and a lateral direction by dry etching or the like from upper and lower surfaces, a vibration of an oblique direction of the arm is suppressed, and hence the unnecessary detection signal can be reduced. <P>COPYRIGHT: (C)2004,JPO |
