DEVICE AND METHOD FOR FORMING FILM, AND PROTECTIVE FILM

摘要

PROBLEM TO BE SOLVED: To provide a method and a device for forming a metal oxide film, and especially a protective film for a plasma display panel by forming a thin film for controlling and improving the property of a metal oxide. SOLUTION: This film formation method forms a thin film of carbon fluoride on a metal oxide-film surface for improving secondary-electron-emission efficiency of the thin film and improves the property of a protective film using a water repellent effect. The conductivity and the temperature characteristic of the protective layer of an alternated type plasma display panel are controlled for improving secondary-electron-emission efficiency to greatly improve the throughput of panel manufacture. COPYRIGHT: (C)2004,JPO