FLOW RATE CONTROL VALVE

摘要

PROBLEM TO BE SOLVED: To highly accurately perform flow rate control corresponding to a change in the flow rate of a fluid flow flowing into a passage without increasing the size of a valve device and requiring an electric system. SOLUTION: Fluid pressure (total pressure) is led from a total pressure entry port 39 opened faced to the fluid flow flowing into the passage whose fluid pressure is to be sensed into a pressure sensing room 28 in a diaphragm device 24 through a pitot tube 38. COPYRIGHT: (C)2004,JPO