| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor dynamic amount sensor capable of detecting a dynamic amount applied from two different directions by using a single semiconductor substrate. SOLUTION: This semiconductor dynamic amount sensor S1 comprises a laminated substrate 10 formed by laminating a second semiconductor layer 12 on a first semiconductor layer 11 through an insulation layer 13. The second semiconductor layer 12 is divided into a movable part 15 and a fixed part 16 through a groove 14, and the insulation layer 13 positioned on the underside of the movable part 15 is removed to form a hollow part 17. Accordingly, the movable part 15 is in the state of being movable on the hollow part 17. The movable part 15 comprises a first movable part 15a rather thick and movable in the substrate surface direction of the laminated substrate 10 and a second movable part 15b rather thin and movable in the substrate thickness direction of the laminated substrate 10. COPYRIGHT: (C)2004,JPO
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