| 摘要 |
PROBLEM TO BE SOLVED: To provide a nondestructive inspection system for accurately detecting a defect of a sample by using a magnetic field detecting means. SOLUTION: This nondestructive inspection system 1 detects a magnetic field induced by a laser beam by a SQUID fluxmeter 16 by scanning a wafer by the laser beam. The SQUID fluxmeter is arranged on the surface side of the sample. While, an automatic focus is performed on the reverse side of the sample. An automatic focusing controller 145 performs an automatic focus by adjusting a distance between an objective lens 129 and the sample by using an automatic focusing actuator 14b. A computer 18 determines the existence of the defect of the sample on the basis of acquired magnetic field distribution data. Since the sample is scanned while keeping a focus, the defect of the sample can be accurately detected. COPYRIGHT: (C)2004,JPO
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