SUBSTRATE-INSPECTION APPARATUS, SUBSTRATE PALETTE, AND ITS SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a substrate-inspection apparatus that reduces fatigue of an observer and omissions in inspection through automation. SOLUTION: The substrate-inspection apparatus for inspecting a substrate by an optical means or the like fixes a wafer pallet 21 for placing the substrate 3 to an output shaft by X and Y axes, comprising a linear motor that is bent in two arc shapes having the same rotation at center and a three-degree-of-freedom motor, where a rotary type motor is arranged at the center position of a circular arc movable element at the inside for driving, and achieves the rotation of the substrate on a pallet and spherical operation. COPYRIGHT: (C)2004,JPO