LIQUID DROP EJECTION HEAD AND INKJET RECORDER

摘要

PROBLEM TO BE SOLVED: To solve a problem that integration is limited in a head employing a diaphragm having an overhanging part. SOLUTION: The diaphragm 2 has a thick part 12 abutting against a piezoelectric element 7, and a thin part 11 around the thick part 12. The thick part 12 has a pattern edge part overhanging in two steps with respect to the thin part 11 wherein the total thickness of the thin part 11 and the thick part 12 is 10μm or above. COPYRIGHT: (C)2004,JPO