COATING APPARATUS AND COATING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a coating apparatus for discharging a coating solution toward a substrate from a nozzle while relatively moving the substrate and the nozzle to apply the same to the coating region on a substrate, and to provide a coating method using the same. SOLUTION: A mask 4 is arranged at a trial coating position and an organic EL material is discharged to the mask 4 while a nozzle 5 is reciprocally moved in an X-direction to form a coating locus CL on the inner peripheral surface of the mask 4 and the coating locus CL is photographed by CCD cameras 81 and 82. Further, the mask 4 is arranged at a coating position and the optical image I11 of the groove 11 of a substrate 1 is photographed by the CCD cameras 81 and 82. After the substrate 1 is positioned on the basis of these photographing results so that the coating locus CL and the groove 11 correspond, the coating treatment of the groove 11 with the organic EL material is carried out. Herein, the discharge of the organic EL material from the nozzle 5 is continuously performed at a constant flow rate without being interrupted until the coating of the groove 11 with the organic EL material is completed from the start of forming the coating locus CL. COPYRIGHT: (C)2004,JPO