| 发明名称 |
METHOD FOR PRODUCING AN INTEGRATED PIN DIODE AND CORRESPONDING CIRCUIT |
| 摘要 |
The invention relates to, inter alia, a method for producing an integrated PIN photodiode comprising a buried region (20) and a connection region (32) which leads towards the buried region (20). Said method enables the PIN photodiode (14) to be integrated in a simple manner. Furthermore, process steps for producing said PIN diode can also be carried out for the production of screening troughs (22, 56). |
| 申请公布号 |
WO2004025739(A2) |
申请公布日期 |
2004.03.25 |
| 申请号 |
WO2003DE02740 |
申请日期 |
2003.08.14 |
| 申请人 |
INFINEON TECHNOLOGIES AG;MUELLER, KARLHEINZ;STURM, JOHANNES, KARL |
发明人 |
MUELLER, KARLHEINZ;STURM, JOHANNES, KARL |
| 分类号 |
H01L21/329;H01L27/14;H01L27/144;H01L29/868;H01L31/105;H01L31/18 |
主分类号 |
H01L21/329 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
