发明名称 REINFORCED CHEMICAL MECHANICAL PLANARIZATION BELT
摘要 A processing belt (150, 160, 170) for use in chemical mechanical planarization (CMP), is provided. The processing belt is reinforced with one of a mesh belt (154) and a woven fabric (164). The processing belt includes a polymeric material (152) encasing the mesh belt to define the processing belt. The processing belt is fabricated so that the mesh belt forms a continuous loop within the polymeric material, and the mesh belt is constructed as a grid of intersecting members (174). The intersecting members are joined at fixed joints (176) to form a rigid support structure for the processing belt.
申请公布号 WO03078859(A3) 申请公布日期 2004.03.25
申请号 WO2003US07389 申请日期 2003.03.10
申请人 LAM RESEARCH CORPORATION 发明人 LIN, JIBING;HYMES, DIANE, J.
分类号 B24B37/013;B24B37/20;B24D11/00;B29D29/00;H01L21/304 主分类号 B24B37/013
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