发明名称 |
REINFORCED CHEMICAL MECHANICAL PLANARIZATION BELT |
摘要 |
A processing belt (150, 160, 170) for use in chemical mechanical planarization (CMP), is provided. The processing belt is reinforced with one of a mesh belt (154) and a woven fabric (164). The processing belt includes a polymeric material (152) encasing the mesh belt to define the processing belt. The processing belt is fabricated so that the mesh belt forms a continuous loop within the polymeric material, and the mesh belt is constructed as a grid of intersecting members (174). The intersecting members are joined at fixed joints (176) to form a rigid support structure for the processing belt. |
申请公布号 |
WO03078859(A3) |
申请公布日期 |
2004.03.25 |
申请号 |
WO2003US07389 |
申请日期 |
2003.03.10 |
申请人 |
LAM RESEARCH CORPORATION |
发明人 |
LIN, JIBING;HYMES, DIANE, J. |
分类号 |
B24B37/013;B24B37/20;B24D11/00;B29D29/00;H01L21/304 |
主分类号 |
B24B37/013 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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