发明名称 MOVING COIL TYPE OF MULTIPHASE LINEAR MOTOR AND DRIVING METHOD THEREFOR, MULTIPHASE LINEAR MOTOR AND ITS DRIVING METHOD, DRIVER, AND EXPOSURE APPARATUS EQUIPPED WITH THEM
摘要 <P>PROBLEM TO BE SOLVED: To simplify the constitution of the peripheral devices of a moving coil type of a multiphase linear motor, by detecting the phase of the moving coil type of the multiphase linear motor and settling the absolute position, without using Hall elements or absolute position sensors. <P>SOLUTION: As the peripheral control equipment for the moving coil type of the three-phase linear motor 4, there are provided a position controller 3, a speed controller, a current controller 3, an incremental encoder 5, a displacement controller 3, an incremental encoder 5, a displacement detector 6, a reference position detector 7, a current command generator 1, and a switch 8 for selecting a current command value to be given to the current controller 3 from either the current controller 2 or the current command generator 1. <P>COPYRIGHT: (C)2004,JPO
申请公布号 JP2004096813(A) 申请公布日期 2004.03.25
申请号 JP20020251092 申请日期 2002.08.29
申请人 CANON INC 发明人 AKIMOTO SATOSHI;SATO KAZUMI
分类号 H01L21/027;H02K41/03;H02K41/035;H02P7/00;H02P25/06 主分类号 H01L21/027
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