OPTICAL DEVICE AND PRODUCTION METHOD THEREFOR

摘要

An optical device which changes the optical axis direction of light propagating in a direction parallel to the surface of a substrate to a direction inclined an angle from the substrate surface, wherein a mechanism for changing the optical axis direction is a reflection surface formed on the substrate surface, and the reflection surface has its width on the substrate surface decreased or increased from a light incident side toward a light travelling direction to enable a mask to be formed in one step, thereby preventing an increase in process steps, enhancing a mask accuracy, and reducing variations in inclined surface and production costs.