发明名称 |
Device for automatically charging machines e.g. reactors, chambers and coating units comprises units for transporting, introducing and removing objects |
摘要 |
Device for automatically charging machines e.g. reactors, chambers and coating units comprises a unit for transporting an object from a group of objects, a unit for introducing an object to a group of objects in the machine, a unit for removing an object from a group of objects, and a unit for transporting an object from a group of objects. An Independent claim is also included for a process for automatically charging machines e.g. reactors, chambers and coating units using the above device.
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申请公布号 |
DE10242752(A1) |
申请公布日期 |
2004.03.25 |
申请号 |
DE20021042752 |
申请日期 |
2002.09.13 |
申请人 |
SCHOTT GLAS |
发明人 |
MEYER, ROLF;KUEPPER, THOMAS;KLEIN, HANS-JUERGEN;EGGERT, HARTMUT;KUNKEL, ARMIN;VOGT, JUERGEN;WOERNER, PETER;WALCH, WOLFGANG |
分类号 |
C23C16/54;(IPC1-7):B65G49/00 |
主分类号 |
C23C16/54 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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