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发明名称
AUFSCHLÄMMUNGSZUSAMMENSETZUNG UND VERFAHREN ZUM CHEMISCH-MECHANISCHEN POLIEREN
摘要
申请公布号
DE60008376(D1)
申请公布日期
2004.03.25
申请号
DE20006008376
申请日期
2000.05.01
申请人
EKC TECHNOLOGY, INC.;BAIKOWSKI CHIMIE, POISY
发明人
SMALL, JAMES;PETERSON, LOUISE;TROUNG, TUAN;BONNEAU, LIONEL;DROUGET, CLAUDE
分类号
B24B37/00;C09G1/02;C09K3/14;H01L21/304;(IPC1-7):C09G1/02
主分类号
B24B37/00
代理机构
代理人
主权项
地址
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