摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of surface acoustic wave apparatus capable of obtaining a surface acoustic wave apparatus of high productivity and high reliability. SOLUTION: The manufacturing method of surface acoustic wave apparatus includes the steps for: fitting a frame to an upper face of a substrate 1 and mounting a surface acoustic wave element 3 having a vibration section 3a at its lower face on an upper face of the substrate 1 placed inside the frame by face-down bonding; dipping the surface acoustic wave element 3 to a liquid resin tank up to the midway in the thickness direction while the substrate 1 is upside down and choking an opening of the frame by a liquid resin while forming an air layer 5 between the lower side of the surface acoustic wave element 3 and the upper face of the substrate 1; and sealing the surface acoustic wave element by a resin layer 4 by curing the substrate in a state where the substrate is positioned upside down. COPYRIGHT: (C)2004,JPO
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