CLEANING DEVICES AND CLEANING METHOD

摘要

PROBLEM TO BE SOLVED: To eliminate cleaning stain after rinsing and drying which is caused by cleaning unevenness due to the week cleaning power in a boundary part between adjacent circular cleaning bodies in a sheet type cleaning device for cleaning by pressing a plurality of rotating circular cleaning bodies from both surface sides of a glass substrate while transporting the glass substrate one by one in the horizontal direction. SOLUTION: In a cleaning method in the sheet type cleaning device for performing the cleaning by pressing a plurality of the rotating circular cleaning bodies from both surface sides of the glass substrate while transporting the glass substrates one by one in the horizontal direction, the whole surface of the the glass substrate is uniformly cleaned by eccentrically rotating the circular cleaning body around a rotary driving shaft attached to a position shifted from the center of the circular cleaning body to overlap a rubbed part of the surface of the glass substrate by the adjacent circular cleaning bodies. COPYRIGHT: (C)2004,JPO