| 摘要 |
PROBLEM TO BE SOLVED: To provide a controller having a boosting means and being usable under a high temperature. SOLUTION: The boosting means 11 for amplifying the force applied to a piston 10 and transmitting the same to a valve rod 9, is kept into contact with an outer peripheral part of the piston 10 at its outer end part, and a flange part 22a formed on the valve rod 9 at its inner end part from its lower side, and has an oscillating member 25 supported on casings 7, 8 oscillatably around a horizontal shaft 26 positioned to an inner end side. Metallic bellows 16 are mounted between an outer peripheral part of a casing top wall 8a and the outer peripheral part of the piston 10 for sealing a space for introducing a compressed air. COPYRIGHT: (C)2004,JPO
|
