发明名称 Method of forming a microstructure using maskless lithography
摘要 A method is provided for fabricating a microstructure using maskless lithography. A first layer is provided in a spaced relationship to a base layer so as to define a construction cavity therebetween. The first layer has a passageway therethrough that communicates with the construction cavity. The construction cavity is filled with material and a polymerizing agent is directed towards a portion of the material so as to polymerize the same. The polymerized material defines a channel network and the non-polymerized material is flushed from the channel network.
申请公布号 US2004055655(A1) 申请公布日期 2004.03.25
申请号 US20030422237 申请日期 2003.04.24
申请人 BEEBE DAVID J. 发明人 BEEBE DAVID J.
分类号 B81C1/00;(IPC1-7):F15C1/04 主分类号 B81C1/00
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