| 发明名称 |
A POLISHING PAD SUPPORT THAT IMPROVES POLISHING PERFORMANCE AND LONGEVITY |
| 摘要 |
<p>The present invention provides, polishing pad (230) with improved polishing properties and longevity. The pad is comprised of a thermoplastic foam substrate (240) having a surface (242) comprised of concave cells (244). A polishing agent (246) coats an interior surface (248) of the concave cells. The invention includes a method for preparing the polishing pad, and a polishing apparatus (200) comprising the polishing pad.</p> |
| 申请公布号 |
WO2004024393(A1) |
申请公布日期 |
2004.03.25 |
| 申请号 |
WO2003US27249 |
申请日期 |
2003.09.02 |
| 申请人 |
PSILOQUEST, INC. |
发明人 |
OBENG, YAW, S.;THOMAS, PETER, A. |
| 分类号 |
B24B37/24;B24B49/16;B24D3/00;B24D3/26;B24D3/34;B24D11/00;B24D13/14;H01L21/304;(IPC1-7):B24B37/04 |
主分类号 |
B24B37/24 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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