| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum film-forming device equipped with an alignment mechanism, not bulky, with the small number of parts, and performing a precise fine adjustment, by arranging in vacuum specifications the alignment mechanism for fine adjusting the relative positions of a board and a mask in a vacuum chamber. SOLUTION: The alignment mechanism 5, arranged on an inside 3 of a vacuum chamber 2 for fine adjusting the relative positions of the board B and the mask M, is provided with a plurality of pairs of drive motors and a movement change mechanism for positioning a movable stage 21 holding the board B against a standard stage holding the mask as to an axial direction and rotation in planes parallel with each other. The mask is held to the standard stage 20 through another drive motor and movement change mechanism, and fine adjusts relative approach to or breaking away from the board B. The alignment mechanism 5 is structured in vacuum specifications and does not contaminate the vacuum chamber 2. COPYRIGHT: (C)2004,JPO
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