| 摘要 |
PROBLEM TO BE SOLVED: To provide the model structure of a control object suitable for non-interfering control or the like and to provide a controller, a temperature controller, and a heat treatment apparatus using the same. SOLUTION: A control object model 1 is made the model structure in which the difference of two outputs z<SB>1</SB>and z<SB>2</SB>are fed back to two inputs u<SB>1</SB>and u<SB>2</SB>via a feedback element Pf with positive and negative differentiation, that is, which is adapted to such a phenomenon that a calorific value (manipulated variable) is moved from one to the other in accordance with a temperature difference (output difference), and this model structure is used to constitute the control object model 1 so that the interference can be canceled by a non-interfering device 8. COPYRIGHT: (C)2004,JPO
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