| 摘要 |
PROBLEM TO BE SOLVED: To provide an objective lens having high durability to collision from directions (more particularly a transverse direction) exclusive of a longitudinal direction. SOLUTION: The objective lens is provided with collision protective members (14, 141, 142, and 143) which are arranged near the tip section of a specimen 2 and provides the protection for the tip section of the objective lens against the collision from the directions exclusive of the direction parallel with the optical axis. COPYRIGHT: (C)2004,JPO
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