| 摘要 |
PROBLEM TO BE SOLVED: To automate a charged particle beam device by monitoring contamination of a throttle hole or degradation in image quality and changing the throttle hole automatically. SOLUTION: A detector 19, which detects the dose of an electron beam radiated onto a throttle board 6, is set between the throttle board 6 and the ground, the contamination of the throttle hole is evaluated, and the throttle hole in the throttle board is changed in response to the degree of the evaluated contamination. In a different way, a laminated film sample 14 for the extraction of resolving power is mounted on a sample table, the resolving power is evaluated, and the throttle hole in the throttle board is changed in response to the evaluated resolving power. COPYRIGHT: (C)2004,JPO
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