发明名称 |
Reducing offset in accelerometers |
摘要 |
Accelerometer offset is reduced by forming mass support structures within an inner periphery of the mass, affixing the mass support structures to the substrate by at least one anchor positioned near the mass' center of mass, and affixing the sensing fingers proximate to the anchor. The mass support structures can be affixed to the substrate using a single anchor or multiple anchors that are positioned close together. The sensing fingers can be affixed to the substrate or to the mass support structures. The mass is typically suspended from within its periphery but toward its outer periphery.
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申请公布号 |
US2004055382(A1) |
申请公布日期 |
2004.03.25 |
申请号 |
US20030622380 |
申请日期 |
2003.07.18 |
申请人 |
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发明人 |
SAMUELS HOWARD R.;HOLLOCHER DAVID C.;JUDY MICHAEL;JUNEAU THOR |
分类号 |
G01P15/02;B81B3/00;G01P15/125;G01P15/18;(IPC1-7):G01P15/02;G01P21/00 |
主分类号 |
G01P15/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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