| 发明名称 |
Semiconductor device having cell plugs |
| 摘要 |
A method for fabricating cell plugs of a semiconductor device with cell plugs is disclosed, which increases the operation speed of the semiconductor device by reducing the cell plug resistance of the device. The semiconductor device includes a first insulating interlayer on a semiconductor substrate; a first cell plug on the semiconductor substrate through the first insulating interlayer; a second insulating interlayer on the first insulating interlayer; a silicide contact on a predetermined surface of the first cell plug through the first insulating interlayer; and a second cell plug on the silicide contact through the second insulating interlayer.
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| 申请公布号 |
US2004056353(A1) |
申请公布日期 |
2004.03.25 |
| 申请号 |
US20030697305 |
申请日期 |
2003.10.31 |
| 申请人 |
HYNIX SEMICONDUCTOR INC. |
发明人 |
LEE YOON JIK;KIM JEONG TAE |
| 分类号 |
H01L21/28;H01L21/283;H01L21/768;H01L21/8242;H01L27/108;(IPC1-7):H01L23/48;H01L23/52;H01L29/40 |
主分类号 |
H01L21/28 |
| 代理机构 |
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