发明名称 JET SINGULATION OF A SUBSTRATE
摘要 <p>Techniques for singulating a substrate (12) into a plurality of component parts is disclosed. The singulation techniques include generating a jet stream (11) in order to cut through large components (12) so as to produce smaller components. The techniques are particularly suitable for singulating surface mount devices such as chip scale packages, ball grid arrays (BGA), flip chips, lead less packages (QFN) and the like. The techniques are also suitable for singulating photonic devices.</p>
申请公布号 WO2004025724(A1) 申请公布日期 2004.03.25
申请号 WO2003US28743 申请日期 2003.09.12
申请人 INTERCON TECHNOLOGY, INC.;SEO, SEILL;JIANG, SHAN;TAY, STEVEN 发明人 SEO, SEILL;JIANG, SHAN;TAY, STEVEN
分类号 B24C5/02;B23Q3/08;B24C1/04;B24C7/00;B24C9/00;B26F3/00;H01L21/00;H01L21/301;H01L21/304;H01L21/48;H01L21/78;H05K3/00;(IPC1-7):H01L21/78 主分类号 B24C5/02
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