| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a planetary motion type polishing device for polishing both sides of a surface made of metal, crystal, or glass at the same time, for solving the problem of strong demands toward large bore diameter of a work piece, high accuracy and reduction of cost, wherein the polishing efficiency of the polishing device with the area of the current machine is improved equally to that of a large polishing device as well as improvement in polishing accuracy. <P>SOLUTION: In this planetary gear type three-way parallel surface polishing device having an ultrasonic vibrator set on an upper lap, ultrasonic vibration is generated all over a surface to be machined of the lap, whereby crushing working using abrasive grains and the conventional polishing are compounded to improve the machining efficiency and accuracy. <P>COPYRIGHT: (C)2004,JPO |
