| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a display device having superior display quality and image scanning performance and to provide its manufacturing method. <P>SOLUTION: When hydrogenating the channel part of a TFT11 and the I layer of photodiodes D1 and D2 together during a manufacturing process of the display device, the progress of the hydrogeneration is made different for the TFT11 and the photodiodes D1 and D2 so that defect density of the channel part of the TFT11 is made low and defect density of the I layer of the photodiodes D1 and D2 is made high. Thus, leak current of the TFT11 is suppressed and light sensitivity of the photodiodes D1 and D2 is improved. <P>COPYRIGHT: (C)2004,JPO</p> |
