METHOD OF MEASURING PARTICLE DIAMETER DISTRIBUTION OF FINE PARTICLES AND APPARATUS FOR THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a method of accurately measuring the particle diameter distribution of agglomerative fine particles which measures the particle diameter distribution of aerosol particles formed from the agglomerative fine particles finely dispersed in a gas phase. SOLUTION: The method and an apparatus for measuring the particle diameter distribution of the fine particles is characterized in that a supercritical suspension fluid formed from the aggregated fine particles suspended in a supercritical fluid is discharged into an environment for vaporizing the supercritical fluid, and the particle diameter distribution of the aerosol particles in a state of the agglomerative fine particles generated and dispersed in a gas that is a vapor from the supercritical fluid of the supercritical suspension fluid is measured. COPYRIGHT: (C)2004,JPO