| 摘要 |
PROBLEM TO BE SOLVED: To provide an insulating film which is excellent in all of thermal properties, electrical properties, physical properties, and mechanical properties, has a very low permittivity and heat resistance and, is therefore useful in, especially, a semiconductor use. SOLUTION: A coating varnish is prepared comprising (1) at least one polybenzoxazole precursor having a structure represented by formula (A) or by formula (A) and formula (F), (2) an organic compound having a heat decomposition temperature of 200-400°C, and (3) an organic solvent in which both of the components (1) and (2) are soluble or dispersible and is formed into a film. In the formulae, n is an integer of 0-1,000; and m is an integer of 10-1,000. COPYRIGHT: (C)2004,JPO
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