| 摘要 |
PROBLEM TO BE SOLVED: To provide a monolithic ink-jet print head in which the adhesiveness of a nozzle plate to a channel plate is improved. SOLUTION: The ink-jet print head is equipped with a channel plate 200 providing an ink chamber 210 and a channel connected by the ink chamber 210 and a nozzle plate 300 in which an orifice 310 corresponding to the ink chamber 210 is formed, and has a structure in which the channel plate 200 and the nozzle plate 300 are formed of a photoresist and the adhesion layer 211 of a silicon-based low temperature vapor-deposition compound that can be formed at a process temperature equal to or lower than the process critical temperature of the channel plate 200 is formed between the channel plate 200 and the nozzle plate 300. The adhesion layer 211 strengthens the adhering power of the channel plate 200 and the nozzle plate 300, and is formed also in the interior of the ink chamber 210 and protects the interior of the ink chamber 210 against an ink. COPYRIGHT: (C)2004,JPO
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