ROBOT FOR TRANSFERRING SUBSTRATE

摘要

PURPOSE: A robot for transferring a substrate is provided to reduce a working area and enhance the efficiency of work by improving a structure of a horizontal shaft arm and a structure of hand. CONSTITUTION: A robot for transferring a substrate includes the first and the second vertical shaft arms(206,210), a horizontal shaft arm(212), and a head(222). The first and the second vertical shaft arms(206,210) are used for controlling the height. The first and the second hands(214,218) for catching objects are moved on a straight line of horizontal shaft arm(212). The horizontal shaft arm(212) is coupled to the head(222). The head is rotatably installed at each front end of the first and the second vertical shaft arms(206,210) in order to switch a vertical state or a horizontal state of the horizontal shaft arm.