DIFFERENTIAL SEAL AND CENTER RING OF ION IMPLANTATION EQUIPMENT

摘要

PURPOSE: A differential seal and a center ring of ion implantation equipment are provided to minimize the generation of leakage by preventing a scratch due to the center ring on the inside of a differential seal housing. CONSTITUTION: A center ring(230) is installed on the inside of a housing(210) of a differential seal of ion implantation equipment. The center ring(230) is formed with teflon. One set of the center ring(230) is formed with three center rings. Each center ring of one set has the same height. The height of the inside of the housing(210) is about 31.05mm. The height of the center ring is about 7.93mm. Two lip-seals(220) are inserted into the inside of the housing in order to perform a vacuum sealing function.