发明名称 Positioner device
摘要 A positioner (2) for moving a sample platform (6) relative to a base (4) is described. The positioner is driven by a piezoelectric arranged to expand and contract along a drive axis, the piezoelectric element has an input end coupled to the base and an output end coupled to first (14) and second (16) output levers extending away from the drive axis of the piezoelectric element in opposing directions. The output levers each have an inner arm arranged to be acted on by the piezoelectric element as it expands and an outer arm to which the sample platform is mounted via platform supports (26, 28). The output levers are mounted such that the piezoelectric element acts on the inner arms of the output levers to cause the outer arms to move in a plane containing the drive axis. This motion of the output levers is communicated via the platform supports to the sample platform, so moving it relative to the base along a direction parallel to the drive axis.
申请公布号 GB0403821(D0) 申请公布日期 2004.03.24
申请号 GB20040003821 申请日期 2004.02.20
申请人 MELLES GRIOT LIMITED 发明人
分类号 G12B5/00;H01L41/09 主分类号 G12B5/00
代理机构 代理人
主权项
地址