发明名称 METHOD AND DEVICE FOR CLEANING AIR
摘要 <p>A method of cleaning air, comprising a humidifying step for humidifying the air containing chemical contaminants by a humidifying means and taking a part of the gaseous contaminants in the air into excessive moisture to remove the contaminants from the air and a dehumidifying step for dehumidifying the humidified air by a condensing means and taking the gaseous chemical contaminants remaining, without being removed, in the humidifying step into condensed water for removal, wherein, by using a oblique honeycomb having both front and rear faces and both upper and lower faces disposed in open state, air is led from the front opening part of the oblique honeycomb and water is fed from the upper opening part thereof to one or both of the humidifying and condensing means. &lt;IMAGE&gt;</p>
申请公布号 EP1400761(A1) 申请公布日期 2004.03.24
申请号 EP20020741307 申请日期 2002.06.26
申请人 NICHIAS CO., LTD.;TOKYO ELECTRON LIMITED 发明人 TERADA, ISAO;TANAKA, MINORU;MATUMURA, YUJI;KOBAYASHI, SADAO;MORI, NAOKI;ITOH, HIROMU;WAKAYAMA, YOSHIHIDE;SUENAGA, OSAMU
分类号 F24F7/06;B01D47/00;B01D53/75;F24F3/14;(IPC1-7):F24F7/06 主分类号 F24F7/06
代理机构 代理人
主权项
地址